A note on optical materials for photolithography applications

Opis książki:

Optical lithography or photolithography is well-established optical tool for patterning of substrates, layers or photonic crystals. Therefore, the materials involved in these processes play an important role, especially for the possibility of their further advancements and optimisation. In this review article, we discuss on the role and significance of photoresist materials from various perspectives like their performance in photonic applications and their dependence on various physical and chemical parameters. Further, several emerging now two-dimensional materials like Graphene has also been discussed from photonic point of view. We aim to give a short overview of recent developments of such materials in this field.